Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yong Yang0
Steven Robert Hayashi0
Tian Chen0
Xiaoming Du0
Guofei Hu0
Howard Paul Weaver0
James Allen Baird, Jr.0
Jianming Zheng0
...
Date of Patent
March 22, 2011
0Patent Application Number
118584830
Date Filed
September 20, 2007
0Patent Primary Examiner
Patent abstract
A method of calibrating an inspection system is provided. The method includes contacting a test part with a run-out measurement device and rotating the test part and measuring a first run-out using the run-out measurement device. The method also includes moving the run-out measurement device to a new position and repeating the steps of contacting and rotating the test part to measure a second run-out at the new position. The method further includes using the first and second run-outs to adjust measurements of the inspection system.
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