Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kenji Goto0
Yasuo Suzuki0
Takuya Kawashima0
Nobuo Tanabe0
Date of Patent
March 29, 2011
0Patent Application Number
120469630
Date Filed
March 12, 2008
0Patent Primary Examiner
Patent abstract
A film forming apparatus is provided which includes a device A that generates liquid fine particles having controlled particle diameters; a device B including a via for guiding the generated liquid fine particles while controlling a temperature thereof; a device C that sprays the guided liquid fine particles; and a device D including a space for forming a transparent conductive film by coating the sprayed liquid fine particles onto a subject to be processed.
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