US Patent 7913646 Vacuum processing apparatus and vacuum processing method
Patent 7913646 was granted and assigned to Hitachi on March, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 28, 2008
0
Date of Patent
March 29, 2011
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Patent Application Number
12199820
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Patent Inventor Names
Masamichi Sakaguchi
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Kazue Takahasi
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Ken Kitaoka
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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