US Patent 7914128 Liquid ejecting head, piezoelectric element, and liquid ejecting apparatus

A liquid ejecting head includes a piezoelectric element in which a lower electrode, a piezoelectric layer, and an upper electrode are laminated in this order, and a flow path forming substrate in which the piezoelectric element is formed above one surface thereof and a pressure generating chamber being communicated with a nozzle opening is provided, in which the upper electrode is formed so as to extend over an upper surface of the piezoelectric layer and an upper portion of side faces of the piezoelectric layer, and a protective film is formed above portions of the piezoelectric layer, which are not covered by the upper electrode.