Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 29, 2011
Patent Application Number
12250989
Date Filed
October 14, 2008
Patent Primary Examiner
Patent abstract
A method for manufacturing a semiconductor device including a vertical cell transistor structure may include forming a vertical cell transistor structure over a semiconductor substrate of a cell region; forming an insulating film over the vertical cell transistor structure; planarizing the insulating film to expose a hard mask film disposed at a top portion of the vertical cell transistor structure; and forming a storage node contact by removing the hard mask film.
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