US Patent 7915178 Passivation of aluminum nitride substrates
Patent 7915178 was granted and assigned to North Carolina State University on March, 2011 by the United States Patent and Trademark Office.
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The present invention provides methods of protecting a surface of an aluminum nitride substrate. The substrate with the protected surface can be stored for a period of time and easily activated to be in a condition ready for thin film growth or other processing. In certain embodiments, the method of protecting the substrate surface comprises forming a passivating layer on at least a portion of the substrate surface by performing a wet etch, which can comprise the use of one or more organic compounds and one or more acids. The invention also provides aluminum nitride substrates having passivated surfaces.
US Patent 07915178 Passivation of aluminum nitride substrates US Patent 7915178 Passivation of aluminum nitride substrates
US Patent 07915178 Passivation of aluminum nitride substrates
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