Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Christoph Schelling0
Hubert Benzel0
Joerg Muchow0
Simon Armbruster0
Date of Patent
April 5, 2011
0Patent Application Number
121584250
Date Filed
November 21, 2006
0Patent Primary Examiner
Patent abstract
A micromechanical sensor element (1) is provided, which has a sealed diaphragm (2) affixed in a frame (3), exhibits high sensitivity at high overload resistance and has a small size, and which allows a piezoresistive measured-value acquisition. To this end, at least one carrier element (4), which is connected to the frame (3) via at least one connection link (5), is formed in the region of the diaphragm (2). Furthermore, piezoresistors (6) for detecting a deformation are situated in the region of the connection link (5).
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