Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Susumu Takagi0
Hidemasa Araie0
Kenichi Takashima0
Date of Patent
April 5, 2011
0Patent Application Number
119901670
Date Filed
August 11, 2006
0Patent Primary Examiner
Patent abstract
Provided is a low-cost electrostatic attraction transfer apparatus which can perform high-speed transfer, stabilizes a contact status of an electrostatic attraction board with a film and the like and does not generate fine defects on an object to be transferred.
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