US Patent 7919193 Shielding, particulate reducing high vacuum components
Patent 7919193 was granted and assigned to KLA-Tencor on April, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 24, 2007
0
Date of Patent
April 5, 2011
0
Patent Application Number
11877713
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Patent Inventor Names
Salam Harb
0
Liqun Han
0
Marian Mankos
0
Mohammed Tahmassebpur
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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