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US Patent 7922820 Heating crucible and deposition apparatus including the same

Patent 7922820 was granted and assigned to Samsung on April, 2011 by the United States Patent and Trademark Office.

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Patent abstract

A heating crucible and a deposition apparatus are provided that have a uniform deposition rate and good reproducibility. The heating crucible of the deposition apparatus includes a titanium body with an internal cavity to contain a material to be deposited and an opening to emit the material to be deposited, a wire to heat the body, and an insulator to insulate the body from the wire.

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