Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masahito Hiroshima0
Date of Patent
April 12, 2011
0Patent Application Number
121556510
Date Filed
June 6, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A light-transmitting mold structure having a mold pattern corresponding to a portion to form a pattern by nanoimprint and a conductive film pattern corresponding to a portion to form a pattern by nonadiabatic near-field exposure is used to irradiate UV light from a back surface of the mold structure and to perform nonadiabatic near-field light exposure in an imprint process so that all patterns having various sizes for simulating various designs can be faithfully transferred by a single imprint process (imprint & UV exposure).
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