US Patent 7923376 Method of reducing defects in PECVD TEOS films
Patent 7923376 was granted and assigned to Novellus Systems on April, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 30, 2006
Date of Patent
April 12, 2011
Patent Application Number
11396303
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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