Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hitoshi Sunaoshi0
Date of Patent
April 12, 2011
0Patent Application Number
121371460
Date Filed
June 11, 2008
0Patent Primary Examiner
Patent abstract
A charged particle beam writing method includes writing a pattern on a first target object by using a charged particle beam in a writing apparatus; and conveying a second target object after having written the pattern on the first target object, wherein even though the second target object is arranged on any one of conveying paths including a carry-out port and a carry-in port of the writing apparatus, a conveying operation for the second target object is not performed during writing the pattern on the first target object.
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