Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 12, 2011
Patent Application Number
12087712
Date Filed
January 10, 2007
Patent Primary Examiner
Patent abstract
An MEMS sensor constructed on a base chip and having a capacitive mode of operation is disclosed. The MEMS sensor has a patterned layer construction applied on the base chip. A cutout is produced in the layer construction, the moveable electrode, for example a membrane, being arranged in said cutout. The cutout is spanned by a covering layer, which bears on the layer construction around the cutout and comprises the back electrode.
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