Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Oleg V. Serebryanov0
Alexander Goldin0
Joseph Michael Ranish0
Date of Patent
April 12, 2011
0Patent Application Number
116199620
Date Filed
January 4, 2007
0Patent Primary Examiner
Patent abstract
An apparatus and method for detecting lamp failure is described for an array of lamps used in a rapid thermal processing system. The lamp failure detection system enables identification of a failed lamp among a plurality of lamps, and also provides identification of the failure type. The apparatus applies a lamp failure detection method to the voltage drop values measured across each lamp to determine if a lamp is in a failure state. In one embodiment, a field programmable gate array is used to apply a failure detection method to the lamp voltage values.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
