US Patent 7924159 Remote wafer presence detection with passive RFID
Patent 7924159 was granted and assigned to Axcelis Technologies on April, 2011 by the United States Patent and Trademark Office.
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Patent abstract
The present invention involves a system and method of remotely detecting the presence of a wafer comprising, a passive RFID circuit, wherein the RFID circuit is attached to an end of a transfer arm located inside a vacuum chamber of an ion implantation system, a reader located outside the vacuum chamber, and wherein the RFID tag provides an indication relating to whether or not a wafer is secured by the transfer arm.
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US Patent 07924159 Remote wafer presence detection with passive RFID US Patent 7924159 Remote wafer presence detection with passive RFID
Infobox
Patent Number
0792415900
Patent Number
792415900
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079241590
Date of Patent
April 12, 2011
0Patent Application Number
120223000
Date Filed
January 30, 2008
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079241590
Date of Patent
April 12, 2011
0Patent Application Number
120223000
Date Filed
January 30, 2008
0Official Website
Patent Primary Examiner
Edits on 19 Jun, 2022
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US Patent 07924159 Remote wafer presence detection with passive RFID
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07924159
Date of patent
April 12, 2011
Patent application number
12022300
Date Filed
January 30, 2008
Patent primary examiner
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