Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard Wallingford0
Kaustubh (Kaust) Namjoshi0
Michael Cook0
Mike Van Riet0
Ajay Gupta0
Chien-Huei (Adam) Chen0
Date of Patent
April 12, 2011
0Patent Application Number
116836960
Date Filed
March 8, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods for identifying array areas in dies formed on a wafer and methods for setting up such methods are provided. One method for identifying array areas in dies formed on a wafer includes comparing an array pattern in a template image acquired in one of the array areas to a search area image acquired for the wafer. The method also includes determining areas in the search area image in which a pattern is formed that substantially matches the array pattern in the template image based on results of the comparing step. In addition, the method includes identifying the array areas in the dies formed on the wafer based on results of the determining step.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.