US Patent 7926959 Beam conditioning to reduce spatial coherence
Patent 7926959 was granted and assigned to KLA-Tencor on April, 2011 by the United States Patent and Trademark Office.
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Patent abstract
Methods and apparatus relating to electromagnetic beam (e.g., laser beam) conditioning are described. In an embodiment, electromagnetic beam conditioning may be performed utilizing reflectors to temporally differentiate electromagnetic beam subsections and sub-beams resulting in reduced spatial coherence of the beam. Other embodiments are also described.
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US Patent 07926959 Beam conditioning to reduce spatial coherence US Patent 7926959 Beam conditioning to reduce spatial coherence
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Patent Number
0792695900
Patent Number
792695900
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079269590
Date of Patent
April 19, 2011
0Patent Application Number
120600500
Date Filed
March 31, 2008
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079269590
Date of Patent
April 19, 2011
0Patent Application Number
120600500
Date Filed
March 31, 2008
0Official Website
Patent Primary Examiner
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US Patent 07926959 Beam conditioning to reduce spatial coherence
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07926959
Date of patent
April 19, 2011
Patent application number
12060050
Date Filed
March 31, 2008
Patent primary examiner
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