Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Christophe Martin0
Date of Patent
April 19, 2011
0Patent Application Number
117151250
Date Filed
March 7, 2007
0Patent Primary Examiner
Patent abstract
A method and an equipment for cleaning masks used for photolithography steps, including at least one step of thermal treatment under pumping at a pressure lower than the atmospheric pressure and at a temperature greater than the ambient temperature.
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