US Patent 7928416 Laser produced plasma EUV light source
Patent 7928416 was granted and assigned to Cymer on April, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 22, 2006
0
Date of Patent
April 19, 2011
0
Patent Application Number
11644153
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Patent Citations Received
Patent Inventor Names
Igor V. Fomenkov
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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