US Patent 7931212 Fluid droplet production apparatus and method

A fluid dispersion device comprises a substrate (3) having an outer section (25) and an inner section (26), said inner section (26) of the substrate (3) having an aperture (11), a dispersion element (10) positioned at said aperture (11) of said substrate (3), and an actuator (4) arranged to coaxially surround said aperture (11) of said substrate (3), wherein the outer edge of said inner section (26) of said substrate (3) is coupled to said outer section (25) of said substrate by a plurality of resilient members (81, 82, 83).