Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jiri Niemistö0
Heikki Kuisma0
Date of Patent
April 26, 2011
0Patent Application Number
116030700
Date Filed
November 22, 2006
0Patent Primary Examiner
Patent abstract
The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention, comprises, suitably bonded to each other, a microelectromechanical chip part sealed by a cover part, and at least one electronic circuit part. The aim of the invention is to provide an improved method of manufacturing a microelectromechanical component, and to provide a microelectromechanical component, which is applicable for use particularly in small microelectromechanical sensor solutions.
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