Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ki Sik Im0
Woo Seok Hyun0
Date of Patent
May 3, 2011
0Patent Application Number
119986060
Date Filed
November 30, 2007
0Patent Primary Examiner
Patent abstract
A method for manufacturing a sensor image may include forming a pixel array including a photodiode structure and an insulating film structure in an active area of a semiconductor substrate; forming a metal pad on the insulating film structure; forming a dielectric and/or etch stop film on the metal pad (and optionally over the pixel array); forming a protective layer on the dielectric and/or etch stop film; and forming a pad opening and a pixel opening by etching the protective layer.
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