Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
May 3, 2011
Patent Application Number
11889175
Date Filed
August 9, 2007
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of fabricating a TFT array substrate that prevents mobile ions from moving from a photoresist to channels of the TFT by the gate electrode of the TFT by performing photolithography processes for ion injection after forming gate electrode of TFT and, in addition, a method of fabricating a TFT array substrate that omits a photolithography process for forming a lower electrode of a storage capacitor by forming the lower electrode of the storage capacitor by a channel doping process for a PMOS TFT.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
