US Patent 7935940 Measuring in-situ UV intensity in UV cure tool
Patent 7935940 was granted and assigned to Novellus Systems on May, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 8, 2008
0
Date of Patent
May 3, 2011
0
Patent Application Number
12008149
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Patent Inventor Names
Eugene Smargiassi
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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