US Patent 7935942 Technique for low-temperature ion implantation
Patent 7935942 was granted and assigned to Varian Semiconductor Equipment Associates on May, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 15, 2006
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Date of Patent
May 3, 2011
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Patent Application Number
11504367
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Patent Citations Received
Patent Inventor Names
Richard S. Muka
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Steven R. Walther
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Jonathan England
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Julian Blake
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Paul J. Murphy
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Reuel B. Liebert
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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