Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akio Ohno0
Date of Patent
May 3, 2011
0Patent Application Number
118506890
Date Filed
September 6, 2007
0Patent Primary Examiner
Patent abstract
In a pair of adjacent stack contact and stack contact in the semiconductor device, the plugs and the plugs are disposed so that a center-to-center distance of the plugs extending through a second interlayer insulating film, which is thicker than the first interlayer insulating film, is larger than a center-to-center distance of the plugs extending through the first interlayer insulating film.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
