Patent attributes
A temperature controlling apparatus that controls the temperature of a temperature-controlling object is disclosed. The temperature controlling apparatus includes an atmospheric coolant circulating line that circulates a coolant through a cooling path arranged at the temperature-controlling object; a heat transfer plate heater that heats the temperature-controlling object; and a coolant discharge part that discharges the coolant remaining in the cooling path when the circulation of the coolant is stopped. When the temperature of the temperature-controlling object is to be controlled to change from a low temperature to a high temperature, the circulation of the coolant is stopped and the coolant discharge part discharges the coolant remaining in the cooling path.
