Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 10, 2011
Patent Application Number
12703747
Date Filed
February 10, 2010
Patent Primary Examiner
Patent abstract
A torsional MEMS device is disclosed. The torsional MEMS device includes a support structure, a platform, and at least two hinges, which connects the platform to the support structure. The platform has an active area and a non-active area. A plurality of sacrificial elements is disposed in the non-active area. If the resonant frequency of the torsional MEMS device is less than a predetermined standard resonant frequency of the torsional MEMS device, at least one sacrificial element is removed to reduce the total mass of the torsional MEMS device, and so as to increase the resonant frequency of the torsional MEMS device.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
