Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jung-Yu Hsieh0
Ling-Wu Yang0
Chun-Ling Chiang0
Date of Patent
May 10, 2011
Patent Application Number
12334829
Date Filed
December 15, 2008
Patent Primary Examiner
Patent abstract
A method of improving the intrinsic gettering ability of a wafer is described. A first annealing step is performed to the wafer at a first temperature in an atmosphere containing at least one of oxygen gas and nitrogen gas. A second annealing step is performed to the wafer, at a second temperature higher than the first temperature, in the atmosphere.
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