Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yim Bun Patrick Kwan0
Date of Patent
May 10, 2011
0Patent Application Number
124719880
Date Filed
May 26, 2009
0Patent Primary Examiner
Patent abstract
The X, Y and Rz positions of a mask stage are measured using two optical encoder-reading heads measuring displacements of respective grid gratings mounted on the mask stage. The grid gratings are preferably provided on cut-away portions of the mask table so as to be coplanar with the pattern on the mask itself. Measurements of the table position in the other degrees of freedom can be measured with capacitive or optical height sensors.
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