Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kazuaki Kaneko0
Eitarou Morimoto0
Yoshiki Aruga0
You Tanaka0
Date of Patent
May 17, 2011
0Patent Application Number
126667480
Date Filed
September 10, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An electrostatic chuck includes a dielectric board having an upper surface on which a plurality of projections for supporting a substrate on top surfaces and recesses surrounding the projections are formed, an electrode formed inside the dielectric board, and an external power supply which applies a voltage to the electrode. The dielectric board includes a conductor film formed on at least the top surface of each projection, and has a three-dimensional structure which causes the conductor film to generate a Johnson-Rahbeck force between the substrate and conductor film when a voltage is applied to the electrode.
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