Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 24, 2011
Patent Application Number
12350510
Date Filed
January 8, 2009
Patent Primary Examiner
Patent abstract
A system for delivering energy to a substrate includes a laser energy source providing a plurality of laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.
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