US Patent 7948639 Phase-shifting interferometry in the presence of vibration
Patent 7948639 was granted and assigned to Zygo Corporation on May, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 4, 2010
0
Date of Patent
May 24, 2011
0
Patent Application Number
12849978
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Patent Inventor Names
Leslie L. Deck
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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