US Patent 7949508 Low vibration rectification in a closed-loop, in-plane MEMS device
All edits
Edits on 28 Nov, 2023
Golden AI
Edits made to:
Article (+606 characters)
Article
Patent abstract
A method for a geometry of a lateral comb drive for an in-plane, electrostatic force feedback, closed-loop, micromachined accelerometer or closed-loop Coriolis rate gyroscope device, or closed-loop capacitive pressure or force measuring device. When vibration is applied to the device, the error in the time-average output, which is vibration rectification error, due to this input vibration is minimized or eliminated. The geometry resulting from practice of the present invention is space-efficient because drive force is maximized while vibration rectification is minimized or eliminated.
Edits on 13 Jul, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07949508 Low vibration rectification in a closed-loop, in-plane MEMS device US Patent 7949508 Low vibration rectification in a closed-loop, in-plane MEMS device
Infobox
Patent Number
0794950800
Patent Number
794950800
Edits on 22 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079495080
Date of Patent
May 24, 2011
0Patent Application Number
127551620
Date Filed
April 6, 2010
0Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079495080
Date of Patent
May 24, 2011
0Patent Application Number
127551620
Date Filed
April 6, 2010
0Patent Primary Examiner
Edits on 7 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07949508 Low vibration rectification in a closed-loop, in-plane MEMS device
Infobox
Is a
Patent jurisdiction
Patent number
07949508
Date of patent
May 24, 2011
Patent application number
12755162
Date Filed
April 6, 2010
Patent primary examiner
Find more entities like US Patent 7949508 Low vibration rectification in a closed-loop, in-plane MEMS device
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
