Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yukio Kenbou0
Minori Noguchi0
Yasuo Yatsugake0
Yoshikazu Tanabe0
Hirofumi Tsuchiyama0
Ichiro Ishimaru0
Ichiro Moriyama0
Kenji Watanabe0
Date of Patent
May 31, 2011
Patent Application Number
12196647
Date Filed
August 22, 2008
Patent Primary Examiner
Patent abstract
The invention provides a surface inspection apparatus and a method for inspecting the surface of a sample that are capable of inspecting discriminatingly between the scratch of various configuration and the adhered foreign object that occur on the surface of a work target when the work target (for example, an insulating film on a semiconductor substrate) is subjected to polishing process such as CMP or grinding process in semiconductor manufacturing process or magnetic head manufacturing process.
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