Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ken-ichiro Shinoda0
Date of Patent
June 7, 2011
Patent Application Number
12177557
Date Filed
July 22, 2008
Patent Primary Examiner
Patent abstract
An adjustment method for adjusting an illumination condition in illuminating an original plate using an illumination optical system and projecting an image of a pattern formed on the original plate onto a substrate through a projection optical system includes measuring a polarization state of light that has passed through the illumination optical system, the original plate, and the projection optical system in a state where the original plate is located on an object plane of the projection optical system, and adjusting the polarization state based on the measured polarization state.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
