US Patent 7955766 Software-controlled maskless optical lithography using fluorescence feedback
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Patent abstract
A software-controlled maskless optical lithography system uses fluorescence feedback to control an aspect of the lithography, such as light source dose, wavelength, or flashing instances or duration, spatial light modulator (SLM) pattern, an optics parameter, a beamsplitter control parameter, or movement or positioning of a stage carrying a target workpiece, such as a semiconductor wafer.
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US Patent 07955766 Software-controlled maskless optical lithography using fluorescence feedback US Patent 7955766 Software-controlled maskless optical lithography using fluorescence feedback
Infobox
Patent Number
0795576600
Patent Number
795576600
Edits on 4 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079557660
Date of Patent
June 7, 2011
0Patent Application Number
126496200
Date Filed
December 30, 2009
0Patent Primary Examiner
Edits on 24 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079557660
Date of Patent
June 7, 2011
0Patent Application Number
126496200
Date Filed
December 30, 2009
0Patent Primary Examiner
Edits on 7 Dec, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07955766 Software-controlled maskless optical lithography using fluorescence feedback
Infobox
Is a
Patent jurisdiction
Patent number
07955766
Date of patent
June 7, 2011
Patent application number
12649620
Date Filed
December 30, 2009
Patent primary examiner
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