US Patent 7956142 Polymerizable sulfonic acid onium salt and resin
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Patent abstract
A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body.
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Patent Inventor Names
Jonathan Joachim Jodry0
Makoto Shimizu0
Masaki Fujiwara0
Satoru Narizuka0
Takuma Ebata0
Tomoki Nagai0
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US Patent 07956142 Polymerizable sulfonic acid onium salt and resin US Patent 7956142 Polymerizable sulfonic acid onium salt and resin
Infobox
Patent Number
079561420
Patent Number
79561420
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
079561420
Date of Patent
June 7, 2011
0Patent Application Number
125141680
Date Filed
November 9, 2007
0Patent Primary Examiner
Edits on 7 Dec, 2021
Golden AI
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Infobox (+7 properties)
US Patent 07956142 Polymerizable sulfonic acid onium salt and resin
Infobox
Is a
Patent jurisdiction
Patent number
07956142
Date of patent
June 7, 2011
Patent application number
12514168
Date Filed
November 9, 2007
Patent primary examiner
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