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US Patent 7956337 Scribe process monitoring methodology

Patent 7956337 was granted and assigned to Applied Materials on June, 2011 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Current Assignee
Applied Materials
Applied Materials
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7956337
Patent Inventor Names
Tzay-Fa (Jeff) Su0
Vicky Svidenko0
Chuck Luu0
Date of Patent
June 7, 2011
Patent Application Number
12207403
Date Filed
September 9, 2008
Patent Primary Examiner
‌
David A. Vanore
Patent abstract

One embodiment of the present invention sets forth a computer-implemented method for tuning laser scribe parameters during the fabrication of a solar module. The method includes analyzing the visual appearance of a laser scribe to extract various morphological parameters related to the quality of a laser scribe process used to produce the scribe. Based on the morphological parameters, the laser scribe parameters may be modified in-situ to achieve settings that are optimal for performing laser scribing in each layer of the solar module. As a result, laser scribe process cycle time may be minimized while providing better indication of the laser scribe process stability and quality relative to the prior art approaches.

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