Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akira Sato0
Toru Watanabe0
Takeshi Mori0
Shogo Inaba0
Date of Patent
June 7, 2011
0Patent Application Number
118320380
Date Filed
August 1, 2007
0Patent Primary Examiner
Patent abstract
A micro-electro mechanical system (MEMS) switch includes a fixed electrode formed on a substrate, and a movable electric resistor formed on the substrate, the movable electric resistor serving as an electric resistor that divides an electric potential where the MEMS switch is set to a conduction state.
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