US Patent 7958612 Low-pressure process apparatus
Patent 7958612 was granted and assigned to AU Optronics on June, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A low-pressure process apparatus for processing a substrate comprises a base, a stage, a housing and at least one first roller set. The stage is disposed on the base for supporting the substrate. The housing is detachably disposed on the base moving between a first position and a second position, wherein when the housing is in a first position, the housing and the base form a chamber to receive the stage. When the housing is detached, the first roller set contacts and supports the housing to facilitate movement thereof in a first horizontal direction.
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Patent Inventor Names
Ting-Hui Huang0
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US Patent 07958612 Low-pressure process apparatus US Patent 7958612 Low-pressure process apparatus
Infobox
Patent Number
079586120
Patent Number
79586120
Edits on 28 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079586120
Date of Patent
June 14, 2011
0Patent Application Number
114215010
Date Filed
June 1, 2006
0Patent Primary Examiner
Edits on 7 Dec, 2021
Golden AI
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Infobox (+8 properties)
US Patent 07958612 Low-pressure process apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07958612
Date of patent
June 14, 2011
Patent application number
11421501
Date Filed
June 1, 2006
Patent primary examiner
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