US Patent 7959141 Stage apparatus
Patent 7959141 was granted and assigned to Sumitomo Heavy Industries on June, 2011 by the United States Patent and Trademark Office.
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Patent abstract
The present invention reduces the footprint of a stage apparatus to achieve a more compact apparatus. Using a Y-axis shaft having a magnet on the inside and a Y-axis mover constituted by a coil that surrounds the Y-axis shaft as a Y-axis drive part for moving a Y-axis movable body makes the drive part smaller than a linear motor. Consequently, a lateral part that faces a side gliding surface is arranged downwardly of the one Y-axis mover, to thereby eliminate the footprint occupied by the lateral part when lined up side-by-side with the Y-axis drive part.
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Patent Inventor Names
Fuminori Makino0
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US Patent 07959141 Stage apparatus US Patent 7959141 Stage apparatus
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Patent Number
07959141
Patent Number
7959141
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US Patent 07959141 Stage apparatus
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Is a
Current assignee
Patent jurisdiction
Patent number
07959141
Date of patent
June 14, 2011
Patent application number
12318251
Date Filed
December 23, 2008
Patent primary examiner
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