Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peter van der Meulen0
Date of Patent
June 14, 2011
0Patent Application Number
118462900
Date Filed
August 28, 2007
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.
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