Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
William N. Sterling0
Gaku Furuta0
Lan Duong0
Date of Patent
June 14, 2011
0Patent Application Number
116729550
Date Filed
February 8, 2007
0Patent Primary Examiner
Patent abstract
A method and apparatus for reducing arcing in a plasma processing system when processing large area substrates which contain one or more holes. In one embodiment of the invention, a substrate support member includes an electrically insulating insert located beneath a hole in an insulating, large area substrate. The insulating insert is made of aluminum oxide, and is located within a hole in the support member such that the insert is disposed beneath a hole in a glass substrate. The substrate support member is made of aluminum with an anodized surface.
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