Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takahiro Dazai0
Hiroaki Shimizu0
Tsuyoshi Nakamura0
Date of Patent
June 14, 2011
0Patent Application Number
123560110
Date Filed
January 19, 2009
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A resist composition comprising a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid, an acid-generator component (B) which generates acid upon exposure, and a nitrogen-containing organic compound (D), the nitrogen-containing organic compound (D) including a nitrogen-containing polymeric compound (D1) having a structural unit (d0) containing a nitrogen atom in the side chain thereof.
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