Patent attributes
Provided is a test apparatus including a test head main body 130 that communicates a signal with the device under test 200, a prober 110 on which the device under test 200 is mounted, and a probe card 300 positioned between the test head main body 130 and the prober 110, where the probe card 300 includes: a plurality of probe pins 320 provided on a surface thereof facing the prober 110 and electrically connected to a terminal of the device under test 200; a plurality of test head pads 330 provided on a surface thereof facing the test head main body 130 and electrically connected to spring pins 129 on the test head main body 130 and to the probe pins 320; and prober pads 340 provided on a surface thereof facing the prober 110 and electrically connected to the plurality of probe pins 320.
