US Patent 7961294 Imaging device in a projection exposure facility
Patent 7961294 was granted and assigned to Carl Zeiss SMT on June, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 8, 2008
Date of Patent
June 14, 2011
Patent Application Number
12247597
Patent Inventor Names
Wolfgang Hummel
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Stefan Schoengart
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Thorsten Rassel
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Ulrich Weber
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Alexander Kohl
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Baerbel Trossbach
0
Erich Merz
0
Hubert Holderer
0
Jochen Weber
0
Johannes Lippert
0
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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