US Patent 7963826 Apparatus and methods for conditioning a polishing pad
Patent 7963826 was granted and assigned to Applied Materials on June, 2011 by the United States Patent and Trademark Office.
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Patent abstract
Apparatus and methods for conditioning a polishing pad include an arm adapted to support a conditioning disk; a drive mechanism coupled to the arm; and a flexible coupling between the drive mechanism and the conditioning disk adapted to allow the conditioning disk to tilt while transmitting rotary motion from the drive mechanism to the conditioning disk. Numerous other aspects are disclosed.
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Patent Inventor Names
Donald J. K. Olgado0
Gerald John Alonzo0
Hung Chih Chen0
Roy C. Nangoy0
Shou-Sung Chang0
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US Patent 07963826 Apparatus and methods for conditioning a polishing pad US Patent 7963826 Apparatus and methods for conditioning a polishing pad
Infobox
Patent Number
079638260
Patent Number
79638260
Edits on 27 Apr, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079638260
Date of Patent
June 21, 2011
0Patent Application Number
126363260
Date Filed
December 11, 2009
0Patent Primary Examiner
Edits on 8 Dec, 2021
Golden AI
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Infobox (+8 properties)
US Patent 07963826 Apparatus and methods for conditioning a polishing pad
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07963826
Date of patent
June 21, 2011
Patent application number
12636326
Date Filed
December 11, 2009
Patent primary examiner
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