Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masaru Takeshita0
Date of Patent
June 21, 2011
Patent Application Number
12303944
Date Filed
May 18, 2007
Patent Primary Examiner
Patent abstract
A positive resist composition including a resin component (A) which exhibits increased alkali solubility under action of acid and an acid-generator component (B) which generates acid upon exposure, the resin component (A) including: a polymer (A1) including a structural unit (a0) represented by general formula (a0) shown below and no structural unit (a1) derived from an acrylate ester containing an acetal-type acid dissociable, dissolution inhibiting group, exclusive of the structural unit (a0), and a polymer (A2) including the structural unit (a1) and no structural unit (a0).
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